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TSV Copper Filling SkyFab TSV8
Classification:
Advanced Packaging
Hotline:
Product Description
▍Produc Overview:
● Good filling performance for high AR (~10) through silicon via
● Thin plating thickness and low protrusion after annealing
● Low organicimpurity in deposition
● Low stress deposition with high ductility and tensile stress
● Plating additives analyzable by CVS
▍Product Features:

Aperture 75 µm, depth 360 µm, AR~5

Aperture 6 µm, depth 75 µm, AR~12